| Título: | A SF6 RF plasma reactor for research on textile treatment |
| Autores: | RICCARDI, C. /et al/ |
| Tipo de documento: | texto impreso |
| ISBN/ISSN/DL: | 30205 |
| Nota general: | ISBN: |
| Langues: | Inglés |
| Clasificación: | S (Separata) |
| Clasificación: | |
| Resumen: | This research concerns the development of a SF6 RF discharge at low pressure in a small reactor for industrial applications. |
| Nota de contenido: | En : Plasma Sources Science and Technology (10) 92-98 (2001) |
